{"@context":{"@vocab":"https://cir.nii.ac.jp/schema/1.0/","rdfs":"http://www.w3.org/2000/01/rdf-schema#","dc":"http://purl.org/dc/elements/1.1/","dcterms":"http://purl.org/dc/terms/","foaf":"http://xmlns.com/foaf/0.1/","prism":"http://prismstandard.org/namespaces/basic/2.0/","cinii":"http://ci.nii.ac.jp/ns/1.0/","datacite":"https://schema.datacite.org/meta/kernel-4/","ndl":"http://ndl.go.jp/dcndl/terms/","jpcoar":"https://github.com/JPCOAR/schema/blob/master/2.0/"},"@id":"https://cir.nii.ac.jp/crid/1010000782298790276.json","@type":"Article","resourceType":"学術雑誌論文(journal article)","dc:title":[{"@language":"ja","@value":"Preparation of hydrogenated diamond-like carbon films using high density pulsed plasmas of Ar/C2H2 and Ne/C2H2 mixture"}],"creator":[{"@id":"https://cir.nii.ac.jp/crid/1420845751152591616","@type":"Researcher","personIdentifier":[{"@type":"KAKEN_RESEARCHERS","@value":"60225042"},{"@type":"NRID","@value":"1000060225042"},{"@type":"NRID","@value":"9000392720298"},{"@type":"NRID","@value":"9000252980539"},{"@type":"NRID","@value":"9000252987532"},{"@type":"NRID","@value":"9000401701248"},{"@type":"NRID","@value":"9000025087302"},{"@type":"NRID","@value":"9000005751147"},{"@type":"NRID","@value":"9000401730483"},{"@type":"NRID","@value":"9000258148660"},{"@type":"NRID","@value":"9000001013862"},{"@type":"NRID","@value":"9000392722739"},{"@type":"NRID","@value":"9000005581063"},{"@type":"NRID","@value":"9000392736316"},{"@type":"NRID","@value":"9000392719146"},{"@type":"NRID","@value":"9000403595964"},{"@type":"NRID","@value":"9000401662498"},{"@type":"NRID","@value":"9000401624611"},{"@type":"NRID","@value":"9000402000748"},{"@type":"NRID","@value":"9000258154220"},{"@type":"NRID","@value":"9000025118318"},{"@type":"NRID","@value":"9000402027322"},{"@type":"NRID","@value":"9000401868914"},{"@type":"NRID","@value":"9000258136612"},{"@type":"NRID","@value":"9000403596110"},{"@type":"NRID","@value":"9000401689098"},{"@type":"NRID","@value":"9000344807007"},{"@type":"NRID","@value":"9000344807683"},{"@type":"NRID","@value":"9000252968097"},{"@type":"NRID","@value":"9000402049369"},{"@type":"NRID","@value":"9000401742657"},{"@type":"NRID","@value":"9000344806782"},{"@type":"NRID","@value":"9000252977642"},{"@type":"NRID","@value":"9000401663431"},{"@type":"NRID","@value":"9000401718685"},{"@type":"NRID","@value":"9000258154584"},{"@type":"NRID","@value":"9000002622619"},{"@type":"NRID","@value":"9000401612051"},{"@type":"NRID","@value":"9000258177123"},{"@type":"NRID","@value":"9000258170023"},{"@type":"NRID","@value":"9000401804872"},{"@type":"NRID","@value":"9000107366712"},{"@type":"NRID","@value":"9000401879974"},{"@type":"NRID","@value":"9000107361551"},{"@type":"NRID","@value":"9000254570399"},{"@type":"NRID","@value":"9000252977069"},{"@type":"NRID","@value":"9000024982033"},{"@type":"NRID","@value":"9000025106867"},{"@type":"NRID","@value":"9000402025767"},{"@type":"NRID","@value":"9000401629826"},{"@type":"NRID","@value":"9000401687585"},{"@type":"NRID","@value":"9000401622325"},{"@type":"NRID","@value":"9000401634993"},{"@type":"NRID","@value":"9000258135665"},{"@type":"NRID","@value":"9000024981886"},{"@type":"NRID","@value":"9000238252697"},{"@type":"NRID","@value":"9000401698534"},{"@type":"NRID","@value":"9000001349114"},{"@type":"NRID","@value":"9000402034676"},{"@type":"NRID","@value":"9000401799880"},{"@type":"NRID","@value":"9000258190342"},{"@type":"NRID","@value":"9000392712082"},{"@type":"RESEARCHMAP","@value":"https://researchmap.jp/read0011723"}],"foaf:name":[{"@language":"ja","@value":"木村 高志"},{"@language":"en","@value":"KIMURA Takashi"}],"jpcoar:affiliationName":[{"@language":"ja","@value":"名古屋工業大学"}]}],"publication":{"prism:publicationName":[{"@language":"ja","@value":"Japanese Journal of Applied Physics"}],"prism:publicationDate":"2016","prism:volume":"55","jointInternationalResearch":"false"},"reviewed":"true","project":[{"@id":"https://cir.nii.ac.jp/crid/1040000782298790272","@type":"Project","projectIdentifier":[{"@type":"KAKEN","@value":"26420230"},{"@type":"JGN","@value":"JP26420230"},{"@type":"URI","@value":"https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-26420230/"}],"notation":[{"@language":"ja","@value":"高密度パルス放電プラズマを用いた多目的イオンプロセス装置の開発"},{"@language":"en","@value":"Development of equipment for multi-purpose materials processing by ions produced in high-density pulsed discharge plasmas"}]}],"dataSourceIdentifier":[{"@type":"KAKEN","@value":"PRODUCT-20247120"}]}