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Many flaked particles generated by electric field stress working as an impulsive force in mass-production plasma etching equipment
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- Kasashima Yuji
- 国立研究開発法人産業技術総合研究所
Bibliographic Information
- Title
- Many flaked particles generated by electric field stress working as an impulsive force in mass-production plasma etching equipment
- Author
- Yuji Kasashima, Fumihiko Uesugi
- Published
- 2015
- Resource Type
- journal article
Journal
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- Proceedings of ICRP-9/SPP-33/GEC-68
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Proceedings of ICRP-9/SPP-33/GEC-68 - 2015
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Details 詳細情報について
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- CRID
- 1010000782321064961
-
- Article Type
- journal article
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- Data Source
-
- KAKEN
