Many flaked particles generated by electric field stress working as an impulsive force in mass-production plasma etching equipment
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- 笠嶋 悠司
- 国立研究開発法人産業技術総合研究所
書誌事項
- タイトル
- Many flaked particles generated by electric field stress working as an impulsive force in mass-production plasma etching equipment
- 著者
- Yuji Kasashima, Fumihiko Uesugi
- 公開日
- 2015
- 資源種別
- journal article
収録刊行物
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- Proceedings of ICRP-9/SPP-33/GEC-68
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Proceedings of ICRP-9/SPP-33/GEC-68 - 2015
