Dependence of Acid Generation Efficiency on Molecular Structures of Acid Generators upon Exposure to Extreme Ultraviolet Radiation

Bibliographic Information

Title
Dependence of Acid Generation Efficiency on Molecular Structures of Acid Generators upon Exposure to Extreme Ultraviolet Radiation
Author
R. Hirose, T. Kozawa, S. Tagawa, T. Kai, T. Shimokawa
Published
2008
Resource Type
journal article

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Details 詳細情報について

  • CRID
    1010000782431998629
  • Article Type
    journal article
  • Data Source
    • KAKEN

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