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Dependence of Acid Generation Efficiency on Molecular Structures of Acid Generators upon Exposure to Extreme Ultraviolet Radiation
Bibliographic Information
- Title
- Dependence of Acid Generation Efficiency on Molecular Structures of Acid Generators upon Exposure to Extreme Ultraviolet Radiation
- Author
- R. Hirose, T. Kozawa, S. Tagawa, T. Kai, T. Shimokawa
- Published
- 2008
- Resource Type
- journal article
Journal
-
- Appl. Phys. Express
-
Appl. Phys. Express 1 27004-, 2008
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Details 詳細情報について
-
- CRID
- 1010000782431998629
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN
