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AlON/ SiO_2 Stacked Gate Dielectrics for 4H-SiC MIS Devices
Bibliographic Information
- Title
- AlON/ SiO_2 Stacked Gate Dielectrics for 4H-SiC MIS Devices
- Author
- T. Hosoi, M. Harada, Y. Kagei, Y. Watanabe, T. Shimura, S. Mitani, Y. Nakano, T. Nakamura, and H. Watanabe
- Published
- 2009
- Resource Type
- journal article
Journal
-
- Mater. Sci. Forum
-
Mater. Sci. Forum 541 615-617, 2009
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Details 詳細情報について
-
- CRID
- 1010000782438912654
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN

