AlON/ SiO_2 Stacked Gate Dielectrics for 4H-SiC MIS Devices

Bibliographic Information

Title
AlON/ SiO_2 Stacked Gate Dielectrics for 4H-SiC MIS Devices
Author
T. Hosoi, M. Harada, Y. Kagei, Y. Watanabe, T. Shimura, S. Mitani, Y. Nakano, T. Nakamura, and H. Watanabe
Published
2009
Resource Type
journal article

Journal

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Details 詳細情報について

  • CRID
    1010000782438912654
  • Article Type
    journal article
  • Data Source
    • KAKEN

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