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Microstructures in directly bonded Sisubstrates

Bibliographic Information

Title
Microstructures in directly bonded Sisubstrates
Author
Y. Ohara, T. Ueda, A. Sakai, O. Nakatsuka, M. Ogawa, S. Zaima, E. Toyoda, H. Isogai, T. Senda, K. Izunome, H. Tajiri, O. Sakata, S. Kimura, T. Sakata, H. Mori

Journal

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Details

  • CRID
    1010000782440633096
  • Article Type
    journal article
  • Data Source
    • KAKEN

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