Dose designing and fabrication of 4H-SiC double RESURF MOSFETs
書誌事項
- タイトル
- Dose designing and fabrication of 4H-SiC double RESURF MOSFETs
- 著者
- T.Kimoto 他
収録刊行物
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- Proc. 18th Int. Symp. On Power Semiconductor Devices
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Proc. 18th Int. Symp. On Power Semiconductor Devices 273-276, 2006