[Updated on Apr. 18] Integration of CiNii Articles into CiNii Research

Change of Zinc Oxide Thin Film Resistively by Irradiation of Hydrogen Plasma Produced by Microwave Surface Wave

Bibliographic Information

Title
Change of Zinc Oxide Thin Film Resistively by Irradiation of Hydrogen Plasma Produced by Microwave Surface Wave
Author
T.NAKAYAMA, Y.SATA, K.KASHIWAGI, et.al.

Journal

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Details

  • CRID
    1010000782452318345
  • Article Type
    journal article
  • Data Source
    • KAKEN

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