Change of Zinc Oxide Thin Film Resistively by Irradiation of Hydrogen Plasma Produced by Microwave Surface Wave
書誌事項
- タイトル
- Change of Zinc Oxide Thin Film Resistively by Irradiation of Hydrogen Plasma Produced by Microwave Surface Wave
- 著者
- T.NAKAYAMA, Y.SATA, K.KASHIWAGI, et.al.
収録刊行物
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- Proc. Of the 6^<th> International Symposium on Microwave Effect/Appplication
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Proc. Of the 6^<th> International Symposium on Microwave Effect/Appplication 213-216, 2006
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詳細情報
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- CRID
- 1010000782452318345
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- 資料種別
- journal article
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- データソース種別
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- KAKEN