著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI) ,Development of On-machine 3D Measuring System for Large Size Si Wafer Thinning Process,Proceedings of ISAAT2007,,,2007,,,75-81,https://cir.nii.ac.jp/crid/1010000782465724191,