Development of On-machine 3D Measuring System for Large Size Si Wafer Thinning Process
書誌事項
- タイトル
- Development of On-machine 3D Measuring System for Large Size Si Wafer Thinning Process
- 著者
- T. Mitsuta, B. Soltani, T. Tsuruga, J. Sasaki, L. Zhou, J. Shimizu and H. Eda
収録刊行物
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- Proceedings of ISAAT2007
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Proceedings of ISAAT2007 75-81, 2007
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詳細情報
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- CRID
- 1010000782465724191
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- 資料種別
- journal article
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- データソース種別
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- KAKEN