著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
,Damage characterization of low-k layers through Cu damascene process using monoenergetic positron beams,Proc.13th IEEE Int.Interconnect Tech.Conf.,,,2010,,,,https://cir.nii.ac.jp/crid/1010000782466252565,