Production of Large Diameter, High-Density Helicon Plasma with Short Axial Length Using a Flat Spiral Antenna
書誌事項
- タイトル
- Production of Large Diameter, High-Density Helicon Plasma with Short Axial Length Using a Flat Spiral Antenna
- 著者
- T. Motomura, K. Tanaka, S. Shinohara, and T. Tanikawa
収録刊行物
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- Engineering Sciences Reports, Kyushu University vol.30
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Engineering Sciences Reports, Kyushu University vol.30 29-31, 2008