著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
,Estimation of optimum ion energy for the reduction of resistivity in bias sputtering of ITO thin films,IEICE TRANSACTIONS on Electronics vol. E91-C,,,2008,,,1653-1657,https://cir.nii.ac.jp/crid/1010000782475400964,