Characteristics of Antisticking Layer Formed by CHF_3 Plasma Irradiation for Nanoimprint Molds

Bibliographic Information

Title
Characteristics of Antisticking Layer Formed by CHF_3 Plasma Irradiation for Nanoimprint Molds
Author
M.Okada, K.Nakamatsu, Y.Kang, K.Kanda, Y.Haruyama, S.Matsui

Journal

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Details

  • CRID
    1010000782481803155
  • Article Type
    journal article
  • Data Source
    • KAKEN

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