著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
,Characteristics of Antisticking Layer Formed by CHF_3 Plasma Irradiation for Nanoimprint Molds,Jpn.J.Appl.Phys. 48,,,2009,,,,https://cir.nii.ac.jp/crid/1010000782481803155,