著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
須田 善行,Electrical Characteristics and Zirconia Film Preparation by a Zirconium-Oxygen Plasma using a Positively Biased Electrode,Plasma Process. Polym. 4,,,2007,,,,https://cir.nii.ac.jp/crid/1010000782485149213,