著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
,Nano-defects inspection of semiconductor wafer using evanescent wave,Proceedings of Photonics in Measurement International Symposium,,,2004,,,307-316,https://cir.nii.ac.jp/crid/1010282256568830467,