[Updated on Apr. 18] Integration of CiNii Articles into CiNii Research

High Rate Growth of Highly-Crystallized Ge Films on Quartz from VHF Inductively-Coupled Plasma of GeH_4 + H_2

Bibliographic Information

Title
High Rate Growth of Highly-Crystallized Ge Films on Quartz from VHF Inductively-Coupled Plasma of GeH_4 + H_2
Author
T. Sakata

Journal

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Details

  • CRID
    1010282256614327058
  • Article Type
    journal article
  • Data Source
    • KAKEN

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