著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
,High Rate Growth of Highly-Crystallized Ge Films on Quartz from VHF Inductively-Coupled Plasma of GeH_4 + H_2,Materials Science Forum 561-565,,,2007,,,1209-1212,https://cir.nii.ac.jp/crid/1010282256614327058,