High Rate Growth of Highly-Crystallized Ge Films on Quartz from VHF Inductively-Coupled Plasma of GeH_4 + H_2
書誌事項
- タイトル
- High Rate Growth of Highly-Crystallized Ge Films on Quartz from VHF Inductively-Coupled Plasma of GeH_4 + H_2
- 著者
- T. Sakata
収録刊行物
-
- Materials Science Forum 561-565
-
Materials Science Forum 561-565 1209-1212, 2007