著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
,Deposition of highly stable a-Si:H films using cluster-eliminating filter,Proceedings of Plasma Science Symposium 2005 and The 22nd Symposium on Plasma Processing,,,2005,,,157-158,https://cir.nii.ac.jp/crid/1010282256753462146,