Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
NAKANO Yoshiaki,Electron cyclotron resonance reactive ion etching of InGaAs/InAlAs/InP multilayer structure and GaN by cyclic injection of CH4/H2/Ar and 02 with constant Ar flow,"Extended Abstracts of the 22nd Electronic Materials Symposium, Biwako, Shiga, July 2-4 B10",,,2003,,,27-30,https://cir.nii.ac.jp/crid/1010282256753485703,