[Updated on Apr. 18] Integration of CiNii Articles into CiNii Research

Piezoelectric microactuators composed of PZT thin films on Si substrates

Bibliographic Information

Title
Piezoelectric microactuators composed of PZT thin films on Si substrates
Author
Isaku Kanno, Yoshiro Tazawa, Takaaki Kunisawa, Takaaki Suzuki, Hidetoshi Kotera

Journal

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Details

  • CRID
    1010282256777470218
  • Article Type
    journal article
  • Data Source
    • KAKEN

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