著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
神野 伊策 and 鈴木 孝明 and 小寺 秀俊,Piezoelectric microactuators composed of PZT thin films on Si substrates,2006 ASME/JSME Joint Conference on Micromechatronics for Information and Precision Equipment (MIPE2006),,,2006,,,,https://cir.nii.ac.jp/crid/1010282256777470218,