Piezoelectric microactuators composed of PZT thin films on Si substrates
書誌事項
- タイトル
- Piezoelectric microactuators composed of PZT thin films on Si substrates
- 著者
- Isaku Kanno, Yoshiro Tazawa, Takaaki Kunisawa, Takaaki Suzuki, Hidetoshi Kotera
収録刊行物
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- 2006 ASME/JSME Joint Conference on Micromechatronics for Information and Precision Equipment (MIPE2006)
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2006 ASME/JSME Joint Conference on Micromechatronics for Information and Precision Equipment (MIPE2006) 2006