Study on the Nano-CMM Probe based on Laser Trapping Technology using an Optical Fiber-Fundamental Analysis of the Optical Fiber Trapping
Bibliographic Information
- Title
- Study on the Nano-CMM Probe based on Laser Trapping Technology using an Optical Fiber-Fundamental Analysis of the Optical Fiber Trapping
- Author
- Sang In EOM, Yasuhiro TAKAYA, Takashi MIYOSHI
Journal
-
- Proceedings of The 3nd International Conference on Leading Edge Manufacturing in 21st Century(LEM21), Nagoya
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Proceedings of The 3nd International Conference on Leading Edge Manufacturing in 21st Century(LEM21), Nagoya 365-370, 2005