Study on the Nano-CMM Probe based on Laser Trapping Technology using an Optical Fiber-Fundamental Analysis of the Optical Fiber Trapping
書誌事項
- タイトル
- Study on the Nano-CMM Probe based on Laser Trapping Technology using an Optical Fiber-Fundamental Analysis of the Optical Fiber Trapping
- 著者
- Sang In EOM, Yasuhiro TAKAYA, Takashi MIYOSHI
収録刊行物
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- Proceedings of The 3nd International Conference on Leading Edge Manufacturing in 21st Century(LEM21), Nagoya
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Proceedings of The 3nd International Conference on Leading Edge Manufacturing in 21st Century(LEM21), Nagoya 365-370, 2005