[Updated on Apr. 18] Integration of CiNii Articles into CiNii Research

Out-of-plane Motion Microactuator Made of Thin Film Metallic Glass

  • HATA Seiichi
    Tokyo Institute of Technology, Frontier Collaborative Research Center, Associate Professor

Bibliographic Information

Title
Out-of-plane Motion Microactuator Made of Thin Film Metallic Glass
Author
Seiichi Hata, Takashi Fukushige, Hiroyuki Tachikawa, Akira, Shimokohbe

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Details

  • CRID
    1010282256778087690
  • Article Type
    journal article
  • Data Source
    • KAKEN

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