Out-of-plane Motion Microactuator Made of Thin Film Metallic Glass
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- 秦 誠一
- 東京工業大学
書誌事項
- タイトル
- Out-of-plane Motion Microactuator Made of Thin Film Metallic Glass
- 著者
- Seiichi Hata, Takashi Fukushige, Hiroyuki Tachikawa, Akira, Shimokohbe
収録刊行物
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- Proc.of 18th International Congress of Mechanical Engineering (COBEM 2005) (CD-ROM)
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Proc.of 18th International Congress of Mechanical Engineering (COBEM 2005) (CD-ROM) 2005
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詳細情報
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- CRID
- 1010282256778087690
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- 資料種別
- journal article
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- データソース種別
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- KAKEN