著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
,A Basic Study on CMP Mechanism and a Trial to produce CMP Slurry by Sol-gel Method,Advances in Abrasive Technology -7^<th> International Symposium in Abrasives,,,2004,,,389-392,https://cir.nii.ac.jp/crid/1010282256789385217,