[Updated on Apr. 18] Integration of CiNii Articles into CiNii Research

Importance of lattice-matching and surface arrangement for the helicon-wave-excited-plasma sputtering epitaxy of ZnO

Bibliographic Information

Title
Importance of lattice-matching and surface arrangement for the helicon-wave-excited-plasma sputtering epitaxy of ZnO
Author
T.Koyama, S.F.Chichibu

Journal

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Details

  • CRID
    1010282256795091585
  • Article Type
    journal article
  • Data Source
    • KAKEN

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