Importance of lattice-matching and surface arrangement for the helicon-wave-excited-plasma sputtering epitaxy of ZnO
書誌事項
- タイトル
- Importance of lattice-matching and surface arrangement for the helicon-wave-excited-plasma sputtering epitaxy of ZnO
- 著者
- T.Koyama, S.F.Chichibu
収録刊行物
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- Journal of Applied Physics 95(12)
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Journal of Applied Physics 95(12) 7856-7861, 2004