Numerical simulation of high frequency coplanar micro-discharge plasma - Influence of electrodes arrangement on discharge property -
Bibliographic Information
- Title
- Numerical simulation of high frequency coplanar micro-discharge plasma - Influence of electrodes arrangement on discharge property -
- Author
- S.Otsuka, F.Tochikubo, S.Uchida
Journal
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- Proc. of the 6^<th> International Conference on reactive Plasmas and 23^<rd> Symposium on Plasma Processing
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Proc. of the 6^<th> International Conference on reactive Plasmas and 23^<rd> Symposium on Plasma Processing 243-244, 2006
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Details
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- CRID
- 1010282256845657986
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- Article Type
- journal article
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- Data Source
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- KAKEN
