Numerical simulation of high frequency coplanar micro-discharge plasma - Influence of electrodes arrangement on discharge property -
書誌事項
- タイトル
- Numerical simulation of high frequency coplanar micro-discharge plasma - Influence of electrodes arrangement on discharge property -
- 著者
- S.Otsuka, F.Tochikubo, S.Uchida
収録刊行物
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- Proc. of the 6^<th> International Conference on reactive Plasmas and 23^<rd> Symposium on Plasma Processing
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Proc. of the 6^<th> International Conference on reactive Plasmas and 23^<rd> Symposium on Plasma Processing 243-244, 2006