[Updated on Apr. 18] Integration of CiNii Articles into CiNii Research

Plasma CVD Reactor with Two-Microwave Oscillators for Crystalline Diamond Film Synthesis

Bibliographic Information

Title
Plasma CVD Reactor with Two-Microwave Oscillators for Crystalline Diamond Film Synthesis
Author
M.Nagatsu

Journal

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Details

  • CRID
    1010282256850968226
  • Article Type
    journal article
  • Data Source
    • KAKEN

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