Plasma CVD Reactor with Two-Microwave Oscillators for Crystalline Diamond Film Synthesis
書誌事項
- タイトル
- Plasma CVD Reactor with Two-Microwave Oscillators for Crystalline Diamond Film Synthesis
- 著者
- M.Nagatsu
収録刊行物
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- Thin Solid Film (掲載予定)
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Thin Solid Film (掲載予定) 2005