著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
,Plasma anisotropic CVD of high purity Cu using Cu(hfac)_2,Proceedings of the 6th International Conference on Reactive Plasmas and 23rd Symposium on Plasma Processing,,,2006,,,119-120,https://cir.nii.ac.jp/crid/1010282256851295497,