[Updated on Apr. 18] Integration of CiNii Articles into CiNii Research

UV Induced Refractive Index Change of SiN Film and Its Application to Center Wavelangth Trimming of Vertically

  • KOKUBUN Yasuo
    Yokohama National University, Faculty of Engineering, Professor

Bibliographic Information

Title
UV Induced Refractive Index Change of SiN Film and Its Application to Center Wavelangth Trimming of Vertically
Author
Toshiki Naganawa, Hirofumi Haeiwa, Yasuo Kokubun

Journal

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Details

  • CRID
    1010282256851322261
  • Article Type
    journal article
  • Data Source
    • KAKEN

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