著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
,Advanced dicing technology for semiconductor wafer-Stealth dicing-,Proc. 15th Int.Symp. on Semiconductor Manuf. (ISSM2006),,,2006,,,215-218,https://cir.nii.ac.jp/crid/1010282256851416727,