著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
,The flux control of ion incident upon the substrate in oxygen plasma for ZnO film synthesis based on mass-selective momentum control,Proceeding of the 6th International Conference on Reactive Plasmas and 23nd Symposium on Plasma Processing AP061201・P-1A-06,,,2006,,,171-172,https://cir.nii.ac.jp/crid/1010282256852030470,