[Updated on Apr. 18] Integration of CiNii Articles into CiNii Research

Reactive sputter deposition of AlInN thin films

Bibliographic Information

Title
Reactive sputter deposition of AlInN thin films
Author
Q.X.Guo, Y.Okazaki, Y.Kume, T.Tanaka, M.Nishio, H.Ogawa

Journal

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Details

  • CRID
    1010282256858939525
  • Article Type
    journal article
  • Data Source
    • KAKEN

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