著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
,Nitrogen concentration and thermal behavior characterized by infrared absorption spectroscopy,Silicon technology (in Japanese) No.68,,,2005,,,35-38,https://cir.nii.ac.jp/crid/1010282256858942600,