Nitrogen concentration and thermal behavior characterized by infrared absorption spectroscopy
書誌事項
- タイトル
- Nitrogen concentration and thermal behavior characterized by infrared absorption spectroscopy
- 著者
- N.Inoue, M.Nakatsu, K.Tanahashi, H.Yamada-Kaneta, H.Ono
収録刊行物
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- Silicon technology (in Japanese) No.68
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Silicon technology (in Japanese) No.68 35-38, 2005
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詳細情報
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- CRID
- 1010282256858942600
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- 資料種別
- journal article
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- データソース種別
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- KAKEN