著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
,Characterization of Inductively-Coupled RF Plasma Sources with Multiple Low-Inductance Antenna Units,Japanese Journal of Applied Physics 45・10B,,,2006,,,8046-8049,https://cir.nii.ac.jp/crid/1010282256865257600,