著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
,Development of Prototype Mask Aligner using Moire Technique,"Proceedings of Materials for the 21st Century -Materials Development for Environment, Energy and Information- 1",,,2004,,,116-119,https://cir.nii.ac.jp/crid/1010282256867930629,