[Updated on Apr. 18] Integration of CiNii Articles into CiNii Research

Application of Kikuchi pattern to precise surface structure of GaN(0001) substrates at different polishing stages

Open Access

Bibliographic Information

Title
Application of Kikuchi pattern to precise surface structure of GaN(0001) substrates at different polishing stages
Author
Y. Shigeta , Y. Hagiwara, T. Otaka J. Namkata, A. Tosaka and K. Koyama

Journal

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Details

  • CRID
    1010282256887418117
  • Article Type
    journal article
  • Data Source
    • KAKEN

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