[Updated on Apr. 18] Integration of CiNii Articles into CiNii Research

Submicron dry-etching behavior of β-FeSi_2 thin films towards fabrication of photonic crystals

Bibliographic Information

Title
Submicron dry-etching behavior of β-FeSi_2 thin films towards fabrication of photonic crystals
Author
A., Imai, S., Kunimatsu, K., Akiyama, Y., Terai, Y., Maeda

Journal

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Details

  • CRID
    1010282256909999240
  • Article Type
    journal article
  • Data Source
    • KAKEN

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