Submicron dry-etching behavior of β-FeSi_2 thin films towards fabrication of photonic crystals
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- 寺井 慶和
- 大阪大学
書誌事項
- タイトル
- Submicron dry-etching behavior of β-FeSi_2 thin films towards fabrication of photonic crystals
- 著者
- A., Imai, S., Kunimatsu, K., Akiyama, Y., Terai, Y., Maeda
収録刊行物
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- Thin Solid Films 515
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Thin Solid Films 515 8162-8165, 2007