著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
寺井 慶和,Submicron dry-etching behavior of β-FeSi_2 thin films towards fabrication of photonic crystals,Thin Solid Films 515,,,2007,,,8162-8165,https://cir.nii.ac.jp/crid/1010282256909999240,