Control of β-FeSi_2/Si interface structure by Cu layer
書誌事項
- タイトル
- Control of β-FeSi_2/Si interface structure by Cu layer
- 著者
- K., Akiyama, M., Itakura, S., Kaneko, H., Funakubo, Y., Maeda
収録刊行物
-
- Thin Solid Films 515
-
Thin Solid Films 515 8144-8148, 2007