著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI) ,Development of Mgsio_3 Biocompatible Piezoelectric Film for Bio-MEMS Actuator,Proc.of SPIE Conference 6415・26,,,2006,,,49,https://cir.nii.ac.jp/crid/1010282256910096029,