Evaluation of imprinting characteristics of photoinduced liquid crystalline polymer
書誌事項
- タイトル
- Evaluation of imprinting characteristics of photoinduced liquid crystalline polymer
- 著者
- M. Okada, S.a Manabe, M. Kurita, M. Kondo, Y. Haruyama, K. Kanda, N. Kawatsuki, and S. Matsui
収録刊行物
-
- Microelectronic Engineering
-
Microelectronic Engineering Vol.88 2079-2083, 2011