Education Position contral of Incorporated Gallium in Diamond-Like Carbon Deposition by Focused-Ion-Beam Chermical Vapor Deposition
Bibliographic Information
- Title
- Education Position contral of Incorporated Gallium in Diamond-Like Carbon Deposition by Focused-Ion-Beam Chermical Vapor Deposition
- Author
- Y. Kometani, S. Ishihara, K. Kanda, Y. Haruyama, T. Kaito, S. Matsui
Journal
-
- Jpn.J.Appl.Phys. Vol.47
-
Jpn.J.Appl.Phys. Vol.47 5032-5035, 2008
